Help with EGR vacuum modulator filter

I'm working on a 1993 Camry and would like to know how to clean the filter in the EGR vacuum modulator.

I've opened the part and removed its filter. The top of the filter is fibrous, but the bottom has become harder (unless it was supposed to be that way from the start). There was a black spot on the bottom of the filter.

What can I use to clean this filter--can I buy a new filter by itself?

[Note: the problem I had was that the car stalled when idling unless I revved the gas pedal. Disconnecting the EGR vacuum modulator restored a steady idle and eliminated the stall, so I hope I've found the solution.]
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Al
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Philip

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